About this course: How can we create nano-structures that are 10,000 times smaller than the diameter of a human hair? How can we “see” at the nano-scale? Through instruction and lab demonstrations, in this course you will obtain a rich understanding of the capabilities of nanotechnology tools, and how to use this equipment for nano-scale fabrication and characterization. The nanoscale is the next frontier of the Maker culture, where designs become reality. To become a Nanotechnology Maker pioneer, we will introduce you to the practical knowledge, skills, and tools that can turn your nanotechnology ideas into physical form and that enable you to image objects at the nano-scale. This course has been developed by faculty and staff experts in nano-fabrication, electron beam microscopy, and nano-characterization through the Research Triangle Nanotechnology Network (RTNN). The RTNN offers training and use of the tools demonstrated in this course to schools and industry through the United States National Nanotechnology Coordinated Infrastructure program. The tools demonstrated in this course are available to the public through the RTNN.
Created by: Duke University, North Carolina State University, The University of North Carolina at Chapel Hill
Taught by: Nan M. Jokerst, J. A. Jones Professor of Electrical and Computer Engineering
Electrical and Computer Engineering, Duke University
Taught by: Carrie Donley, Director of CHANL (Chapel Hill Analytical and Nanofabrication Laboratory)
Applied Physical Sciences, UNC Chapel Hill
Taught by: James Cahoon, Assistant Professor
Chemistry, UNC Chapel Hill
Taught by: Jacob Jones, Professor
Materials Science and Engineering, North Carolina State University
| Language | English |
| How To Pass | Pass all graded assignments to complete the course. |
Syllabus
WEEK 1
Introduction to Nanotechnology
Welcome to Nanotechnology! In this module, you will learn some of the basics of nanofabrication and nanocharacterization techniques as well as specific applications of nanotechnology in commercial products. You’ll be able to explain why a cleanroom and vacuum environment are necessary for creating nanotechnology products. Finally, you will be able to explain how we use light, x-rays, and electron beams to characterize objects at the nanoscale. For more detailed learning objectives for each video, please see the first reading.
10 videos, 3 readings, 2 practice quizzes
- Video: Welcome to the Course
- Video: Introduction to RTNN
- Reading: Learning Objectives for Introduction
- Video: What is Nanotechnology?
- Video: Introduction to Nano Measurement Tools
- Video: Introduction to Nano Fabrication Tools
- Practice Quiz: Practice Quiz for Introduction
- Reading: Learning Objectives for Essential Technologies for Nano
- Video: Essential Technologies for Nano: Cleanroom
- Video: Essential Technologies for Nano: Vacuum Systems
- Video: Essential Technologies for Nano: Electromagnetic Spectrum
- Video: Essential Technologies for Nano: Electron Beams
- Practice Quiz: Practice Quiz for Essential Technologies for Nano
- Video: Accessing RTNN Facilities
- Reading: Research Triangle Nanotechnology Network
Graded: Introduction and Essential Technologies for Nano
WEEK 2
Nano Measurement and Characterization Tools: Scanning Electron Microscopy and Energy-Dispersive X-ray Spectroscopy
After this module, you will be able to explain sample preparation and imaging techniques used in scanning electron microscopy. You will also be able to explain the benefits of environmental scanning electron microscopy. Furthermore, you will discover how energy-dispersive x-ray spectroscopy can be paired with scanning electron microscopy to gain elemental information about samples.
8 videos, 3 readings, 2 practice quizzes
- Reading: Learning Objectives for Scanning Electron Microscopy
- Video: Scanning Electron Microscopy: Basic Function
- Video: Scanning Electron Microscopy: Sample Preparation Demonstration
- Video: Scanning Electron Microscopy: Measurement Demonstration
- Practice Quiz: Practice Quiz for Scanning Electron Microscopy
- Reading: Learning objectives for Energy-dispersive X-ray Spectroscopy
- Video: Energy-Dispersive X-ray Spectroscopy: Basic Function
- Video: Energy-dispersive X-ray Spectroscopy: Sample Preparation Demonstration
- Video: Energy-Dispersive X-ray Spectroscopy: Measurement Demonstration
- Practice Quiz: Practice Quiz on Energy-dispersive X-ray Spectroscopy
- Video: Introduction to RTNN
- Video: Accessing RTNN Facilities
- Reading: Research Triangle Nanotechnology Network
Graded: Nano Measurement and Characterization Tools: Scanning Electron Microscopy and Energy-Dispersive X-ray Spectroscopy
WEEK 3
Nano Measurement and Characterization Tools: Transmission Electron Microscopy
In this module, we will look at transmission electron microscopy and cryo-transmission electron microscopy. You will learn to describe the basic function of the equipment as well as how samples are prepared and imaged using these techniques.
7 videos, 3 readings, 2 practice quizzes
- Reading: Learning Objectives for Transmission Electron Microscopy
- Video: Transmission Electron Microscopy: Basic Function
- Video: Transmission Electron Microscopy: Sample Preparation Demonstration
- Video: Transmission Electron Microscopy: Measurement Demonstration
- Practice Quiz: Practice quiz on Transmission Electron Microscopy
- Reading: Learning Objectives for Cryo-Transmission Electron Microscopy
- Video: Cryo-Transmission Electron Microscopy: Basic Function
- Video: Cryo-Transmission Electron Microscopy: Sample Preparation Demonstration
- Practice Quiz: Practice Quiz on Cryo-Transmission Electron Microscopy
- Reading: Research Triangle Nanotechnology Network
- Video: Introduction to RTNN
- Video: Accessing RTNN Facilities
Graded: Nano Measurement and Characterization Tools: Transmission Electron Microscopy
WEEK 4
Nano Measurement and Characterization Tools: X-ray and Optical Characterization
In this module, we will see demonstrations of micro-computed tomography, X-ray photoelectron spectroscopy, and optical spectroscopy. You will learn the basic function of the equipment and how samples are prepared and measured.
11 videos, 4 readings, 3 practice quizzes
- Reading: Learning Objectives for Micro Computed Tomography
- Video: Micro Computed Tomography: Basic Function
- Video: Micro Computed Tomography: Sample Preparation Demonstration
- Video: Micro Computed Tomography: Measurement Demonstration
- Practice Quiz: Practice Quiz on Micro Computed Tomography
- Reading: Learning Objectives for X-ray Photoelectron Spectroscopy
- Video: X-ray Photoelectron Spectroscopy: Basic Function
- Video: X-ray Photoelectron Spectroscopy: Sample Preparation Demonstration
- Video: X-ray Photoelectron Spectroscopy: Measurement Demonstration
- Practice Quiz: Practice Quiz on X-ray Photoelectron Spectroscopy
- Reading: Learning Objectives for Optical Spectroscopy
- Video: Optical Spectroscopy: Basic Function
- Video: Optical Spectroscopy: Sample Preparation Demonstration
- Video: Optical Spectroscopy: Measurement Demonstration
- Practice Quiz: Practice Quiz on Optical Spectroscopy
- Reading: Research Triangle Nanotechnology Network
- Video: Introduction to RTNN
- Video: Accessing RTNN Facilities
Graded: Nano Measurement and Characterization Tools: X-ray and Optical Characterization
WEEK 5
Nanofabrication: Vacuum Pumps and Thin Film Vacuum Deposition
In this module, we will discover how and why a vacuum environment is required in nanofabrication, compare the operation of three types of vacuum pumps, and look at vacuum deposition of thin films using three different methods: sputter evaporation, e-beam evaporation and thermal evaporation.
11 videos, 3 readings, 2 practice quizzes
- Reading: Learning Objectives for Vacuum Systems in Depth
- Video: Mechanical Pumps: Basic Function
- Video: Turbopump: Basic Function
- Video: Cryopump: Basic Function
- Practice Quiz: Practice Quiz on Vacuum Systems in Depth
- Reading: Learning Objectives for Thin Film Vacuum Deposition
- Video: Thermal Evaporation: Basic Function
- Video: Thermal Evaporation: Sample Deposition Demonstration
- Video: E-Beam Evaporation: Basic Function
- Video: E-Beam Evaporation: Sample Deposition Demonstration
- Video: Sputter: Basic Function
- Video: Sputter: Sample Deposition Demonstration
- Practice Quiz: Practice Quiz on Thin Film Vacuum Deposition
- Reading: Research Triangle Nanotechnology Network
- Video: Introduction to RTNN
- Video: Accessing RTNN Facilities
Graded: Nanofabrication: Vacuum Pumps and Thin Film Vacuum Deposition
WEEK 6
Nanofabrication: Vapor Deposition
We will look at some techniques for making things with nanotechnology using thin film techniques; in this module you will learn to describe and compare atomic layer deposition, chemical vapor deposition, and plasma-enhanced chemical vapor deposition.
8 videos, 4 readings, 3 practice quizzes
- Reading: Learning Objectives for Atomic Layer Deposition
- Video: Atomic Layer Deposition: Basic Function
- Video: Atomic Layer Deposition: Process Demonstration
- Practice Quiz: Practice Quiz on Atomic Layer Deposition
- Reading: Learning Objectives for Chemical Vapor Deposition
- Video: Chemical Vapor Deposition: Basic Function
- Video: Chemical Vapor Deposition: Process Demonstration
- Practice Quiz: Practice Quiz on Chemical Vapor Deposition
- Reading: Learning Objectives for Plasma Enhanced Chemical Vapor Deposition
- Video: Plasma Enhanced Chemical Vapor Deposition: Basic Function
- Video: Plasma Enhanced Chemical Vapor Deposition: Sample Deposition Demonstration
- Practice Quiz: Practice Quiz on Plasma Enhanced Chemical Vapor Deposition
- Reading: Research Triangle Nanotechnology Network
- Video: Introduction to RTNN
- Video: Accessing RTNN Facilities
Graded: Nanofabrication: Vapor Deposition
WEEK 7
Nanofabrication: Patterning and Self-Assembly
In this module, we will investigate 5 different methods used in nanotechnology for patterning. You will be able to explain the basic processes of photolithography, e-beam lithography, ion beam lithography, hot embossing, and self-assembly.
11 videos, 6 readings, 5 practice quizzes
- Reading: Learning Objectives for Photolithography
- Video: Photolithography: Basic Function
- Video: Photolithography: Sample Patterning Demonstration
- Practice Quiz: Practice Quiz on Photolithography
- Reading: Learning Objectives for Electron-beam Lithography
- Video: Electron-beam Lithography: Basic Function
- Video: Electron-beam Lithography: Sample Patterning Demonstration
- Practice Quiz: Practice Quiz on Electron-beam Lithography
- Reading: Learning Objectives for Ion Beam
- Video: Ion Beam: Basic Function
- Video: Ion Beam: Milling and Sectioning Demonstration
- Practice Quiz: Practice Quiz on Ion Beam
- Reading: Learning Objectives for Hot Embossing
- Video: Hot Embossing: Basic Function
- Video: Hot Embossing: Sample Patterning Demonstration
- Practice Quiz: Practice Quiz on Hot Embossing
- Reading: Learning Objectives for Self-Assembly
- Video: Self-Assembly
- Practice Quiz: Practice Quiz on Self-Assembly
- Reading: Research Triangle Nanotechnology Network
- Video: Introduction to RTNN
- Video: Accessing RTNN Facilities
Graded: Nanofabrication: Patterning and Self-Assembly
WEEK 8
Nanofabrication: Etching
In this module, you will learn to describe and compare wet and dry etching processes. These processes are used to selectively remove material in nanofabrication.
7 videos, 4 readings, 3 practice quizzes
- Reading: Learning Objectives for Etching
- Video: Etching: Basic Function
- Practice Quiz: Practice Quiz on Etching
- Reading: Learning Objectives for Chemical Wet Etching
- Video: Chemical Wet Etching: Basic Function
- Video: Chemical Wet Etching: Demonstration
- Practice Quiz: Practice Quiz on Chemical Wet Etching
- Reading: Learning Objectives for Dry Etching
- Video: Dry Etching: Basic Function
- Video: Dry Etching: Demonstration
- Practice Quiz: Practice Quiz on Dry Etching
- Reading: Research Triangle Nanotechnology Network
- Video: Introduction to RTNN
- Video: Accessing RTNN Facilities
Graded: Nanofabrication: Etching
Closing
1 video
- Video: Closing video
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NC State was founded with a purpose: to create economic, societal and intellectual prosperity for the people of North Carolina and the country. We began as a land-grant institution teaching the agricultural and mechanical arts. Today, we’re a pre-eminent research enterprise that excels in science, technology, engineering, math, design, the humanities and social sciences, textiles and veterinary medicine.
The University of North Carolina at Chapel Hill
The University of North Carolina at Chapel Hill, the nation’s first public university, is known around the world for innovative teaching and research. Regularly ranked as the nation’s best value for academic quality, UNC has produced the most Rhodes Scholars for the past 25 years among U.S. public research universities.
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